Semiconductor Device with a Passivation Layer and Method for Producing Thereof

ABSTRACT

A semiconductor device includes a semiconductor body comprising a first surface and an edge surface, a contact electrode formed on the first surface and comprising an outer edge side, and a passivation layer section conformally covering the outer edge side of the contact electrode. The passivation layer section is a multi-layer stack comprising a first layer, a second layer, and a third layer. Each of the first, second and third layers include outer edge sides facing the edge surface and opposite facing inner edge sides. The outer edge side of the contact electrode is disposed laterally between the inner edge sides and the outer edge sides of each layer.

RELATED APPLICATIONS

This application is a continuation of and claims priority to U.S.application Ser. No. 16/394,803 filed on Apr. 25, 2019, which in turnclaims priority to U.S. application Ser. No. 14/200,732 filed on Mar. 7,2014, the content of each being incorporated by reference herein in itsentirety.

TECHNICAL FIELD

Embodiments of the present invention relate to a semiconductor device,and in particular relate to a power semiconductor device with apassivation layer.

BACKGROUND

Power semiconductor device such as power diodes or power transistors arecapable of blocking high voltages of several 10V, several 100V or evenseveral kilovolts (kV). A high voltage blocking capability is associatedwith high electric fields in a semiconductor body in which activeregions of the semiconductor device are integrated. Surfaces of thesemiconductor body where high electric fields occur in a blocking statein particular are very sensitive and require a suitable treatment inorder to prevent degradation effects that may result in a reduction ofthe voltage blocking capability. Such treatment may include theformation of a passivation layer on the surface. However, in undercertain circumstances such as, for example, a humid and hot environment,conventional passivation layers may suffer from degradation that maycause corrosion of semiconductor body and/or a metallization contactingthe semiconductor body

There is a need to provide a semiconductor device with a mechanicallyand chemically very robust passivation layer.

SUMMARY

A first embodiment relates to a semiconductor device. The semiconductordevice includes a semiconductor body having a first surface, a contactelectrode on the first surface, and a passivation layer on the firstsurface adjacent the contact electrode and partially overlapping thecontact electrode. The passivation layer includes a layer stack with afirst layer including an oxide on the first surface, and a second layerincluding a nitride on the first layer.

A second embodiment relates to a method. The method includes providing asemiconductor body having a first surface, forming a contact electrodeon the first surface, and forming a passivation layer on the firstsurface adjacent the contact electrode and partially overlapping thecontact electrode. The passivation layer includes a layer stack with afirst layer including an oxide on the first surface, and a second layerincluding a nitride on the first layer.

A third embodiment relates to a semiconductor device. The semiconductordevice includes a semiconductor body comprising a first surface and anedge surface laterally terminating the first surface, a contactelectrode formed on the first surface and comprising an outer edge sidethat faces and is laterally spaced apart from the edge surface, and apassivation layer section conformally covering the outer edge side ofthe contact electrode. The passivation layer section is a multi-layerstack comprising a first layer, a second layer, and a third layer, eachof the first, second and third layers being formed from differentelectrically insulating materials. The first layer directly contacts thecontact electrode and the first surface. The second layer is formeddirectly on the first layer. The third layer is formed directly on thesecond layer. Each of the first, second and third layers comprise outeredge sides facing the edge surface of the semiconductor body and inneredge sides opposite from the outer edge sides. The outer edge side ofthe contact electrode is disposed laterally between the inner edge sidesand the outer edge sides of each of the first, second and third layers.The inner edge side of the third layer is laterally closer to the outeredge side of the electrode than the inner edge side of the second layer.The outer edge side of the third layer is laterally closer to the outeredge side of the electrode than the outer edge side of the second layer.

A fourth embodiment relates to a method. The method includes providing asemiconductor body comprising a first surface and an edge surfacelaterally terminating the first surface, forming a contact electrode onthe first surface that comprises an outer edge side that faces and islaterally spaced apart from the edge surface, and forming a passivationlayer section that conformally covers the outer edge side of the contactelectrode. The passivation layer section is a multi-layer stackcomprising a first layer, a second layer, and a third layer, each of thefirst, second and third layers being formed from different electricallyinsulating materials. The first layer directly contacts the contactelectrode and the first surface. The second layer is formed directly onthe first layer. The third layer is formed directly on the second layer.Each of the first, second and third layers comprise outer edge sidesfacing the edge surface of the semiconductor body and inner edge sidesopposite from the outer edge sides. The outer edge side of the contactelectrode is disposed laterally between the inner edge sides and theouter edge sides of each of the first, second and third layers. Theinner edge side of the third layer is laterally closer to the outer edgeside of the electrode than the inner edge side of the second layer. Theouter edge side of the third layer is laterally closer to the outer edgeside of the electrode than the outer edge side of the second layer.

BRIEF DESCRIPTION OF THE DRAWINGS

Examples will now be explained with reference to the drawings. Thedrawings serve to illustrate the basic principle, so that only aspectsnecessary for understanding the basic principle are illustrated. Thedrawings are not to scale. In the drawings the same reference charactersdenote like features.

FIG. 1 illustrates a vertical cross sectional view of one embodiment ofa semiconductor device including a passivation layer on a first surfaceof a semiconductor body.

FIG. 2 illustrates a vertical cross sectional view of another embodimentof a semiconductor device including a passivation layer on a firstsurface of a semiconductor body.

FIG. 3 shows a top-down view of one embodiment of a semiconductor deviceincluding a passivation layer on a first surface of a semiconductorbody.

FIG. 4 illustrates a vertical cross sectional view of another embodimentof a semiconductor device including a passivation layer on a firstsurface of a semiconductor body.

FIG. 5 illustrates a vertical cross sectional view of one embodiment ofa semiconductor device including a passivation layer on a first surfaceof a semiconductor body, a soft encapsulation layer, and a housing.

FIG. 6 illustrates a vertical cross sectional view of a semiconductordevice including a pn-junction.

FIG. 7 illustrates a vertical cross sectional view of a semiconductordevice implemented as a bipolar diode.

FIG. 8 illustrates a vertical cross sectional view of a semiconductordevice implemented as a Schottky diode.

FIG. 9 illustrates a vertical cross sectional view of a semiconductordevice implemented as an MOS transistor.

FIG. 10 illustrates a vertical cross sectional view of a semiconductordevice implemented as a JFET.

FIGS. 11A-11C illustrate one embodiment of a method for producing asemiconductor device with a passivation layer.

FIGS. 12A-12B illustrate another embodiment of a method for producing asemiconductor device with a passivation layer.

DETAILED DESCRIPTION

In the following Detailed Description, reference is made to theaccompanying drawings, which form a part thereof, and in which is shownby way of illustration specific embodiments in which the invention maybe practiced.

FIGS. 1 and 2 illustrate a vertical cross sectional view of a section ofa semiconductor device, such as a power semiconductor device. Thesemiconductor device includes a semiconductor body 100 with a firstsurface 101. The semiconductor device further includes a contactelectrode 2 on the first surface 101 and adjoining the semiconductorbody 100.

According to one embodiment, the contact electrode 21 includes at leastone of aluminum, titanium, copper, an aluminum alloy, a copper alloy, analuminum-copper alloy such as AlCu or AlSiCu. The contact electrode 2may include one layer, as shown in FIG. 1. According to anotherembodiment shown in

FIG. 2, the contact electrode 2 includes a first sublayer 21 contactingthe first surface 101, and a second sublayer on the first sublayer 21.According to one embodiment, the first sublayer 21 is a titanium (Ti)layer and the second sublayer 22 is one of an aluminum layer, copperlayer, an aluminum alloy layer, copper alloy layer, and aluminum-copperalloy layer. Referring to FIG. 2, the first sublayer may be implementedwith a larger area than the first sublayer 21 so that the first layer21, below the second layer 22, protrudes beyond the second sublayer 22.The passivation layer 3 overlaps both sublayers 21, 22.

The contact electrode 2 does not completely cover the first surface 101.A passivation layer 3 is formed in those regions of the first surface101 adjacent the contact electrode 21 and not covered by the contactelectrode 21. The passivation layer protects the first surface 101 ofthe semiconductor body 100 and provides for a long-term stability of thesemiconductor device. In particular, the passivation layer 3 prevents,or at least reduces, degradation processes that may occur when asemiconductor device is operated in a humid atmosphere. Thosedegradation processes may occur, in particular, in those regions of thefirst surface 101 where high electric fields may occur.

Referring to FIG. 1, the semiconductor body 100 includes an edge surface102. The edge surface 102 terminates the semiconductor body 100laterally, which means in directions substantially parallel to the firstsurface 101. The edge surface can be substantially perpendicular to thefirst surface 101. However, according to one embodiment (shown in dashedlines in FIG. 1) the edge surface 102 is beveled relative to thevertical direction of the semiconductor body 100 (the vertical directionis a direction substantially perpendicular to the first surface 101).

Referring to FIG. 1, the passivation layer 3 overlaps the contactelectrode 2, but does not completely cover the contact electrode 2.According to one embodiment, an overlap d0 is between 100 micrometers(μm) and 200 micrometers. The “overlap” d0 is the distance thepassivation layer 3 overlaps the contact electrode in a direction facingaway from an outer edge of the contact electrode 2. In those regions ofthe contact electrode 2 that are not covered by the passivation layer 3the contact electrode can be contacted by bond wires (not shown) or thelike.

The basic device structure illustrated in FIG. 1 with a semiconductorbody 100, a contact electrode 2 on the first surface 101 of thesemiconductor body 100, and a passivation layer 3 can be implemented indifferent semiconductor devices and is not restricted to one specifictype of semiconductor device. Thus, in FIG. 1 only the semiconductorbody 100, but not specific device regions implemented in thesemiconductor body 100 are illustrated. Some embodiments of specificsemiconductor devices and of specific device structures in thesemiconductor body 100 are explained with reference to FIGS. 6-8 below.

Referring to FIG. 1, the passivation layer 3 includes a layer stack. Thelayer stack includes a first layer 31 including an oxide on the firstsurface, and a second layer 32 including a nitride on the first layer.According to one embodiment, the layer stack further includes a thirdlayer 33 including an imide in the second layer.

According to one embodiment, a thickness d1 of the first layer 31 on thefirst surface 101 is at least 1.5 micrometers (μm) or at least 2.7micrometers. According to one embodiment, a maximum thickness of thefirst layer 31 on the first surface is 3.5 micrometers. A thickness ofthe first layer 31 in those regions where it overlaps the contactelectrode 2 may substantially correspond to the thickness above thefirst surface 101.

According to one embodiment, a thickness d2 of the second layer 32 is atleast 0.6 micrometers (μm) or at least 0.8 micrometers. According to oneembodiment, a maximum thickness of the second layer 32 is 1 micrometer.The thickness of the second layer 32 in those regions where it overlapsthe contact electrode 2 may substantially correspond to the thickness inthose regions where it does not overlap the contact electrode.

According to one embodiment, a thickness d3 of the third layer 33 is atleast 7 micrometers (μm), 8 micrometers, 20 micrometers, or 30micrometers. According to one embodiment, a maximum thickness of thethird layer 33 is 50 micrometers. The thickness of the third layer 33 inthose regions where it overlaps the contact electrode 2 maysubstantially correspond to the thickness in those regions where it doesnot overlap the contact electrode.

The semiconductor body 100 may include a conventional semiconductormaterial such as a group IV semiconductor, a IV-IV semiconductors, aIII-V semiconductor, or a II-VI semiconductor. Examples of a group IVsemiconductor include silicon (Si) and germanium (Ge). Examples of aIV-IV semiconductor include silicon carbide (SiC), and silicon germanium(SiGe). Examples of a III-V semiconductor include gallium arsenide(GaAs), gallium nitride (GaN), gallium phosphide (GaP), indium phosphide(InP), indium gallium nitride (InGaN), and indium gallium arsenide(InGaAs). Examples of a II-VI semiconductor include cadmium telluride(CdTe), cadmium mercury telluride (CdHgTe), and cadmium magnesiumtelluride (CdMgTe). According to one embodiment, the oxide in the firstlayer 31 is silicon oxide (silicon dioxide, SiO₂) and the nitride in thesecond layer 32 is silicon nitride (Si₃N₄). This choice of the oxide andthe nitride may be independent of the specific type of semiconductormaterial of the semiconductor body 100.

The first layer 31 may include two or more sublayers with each sublayerincluding an oxide. According to one embodiment, the first layerincludes at least one of the following oxide layers, an undoped silicateglass (USG), a phosphorous doped silicate glass (PSG), a boron dopedsilicate glass (BSG), or a boron and phosphorous doped silicate glass(BPSG). According to one embodiment, the first layer 31 includes onlyone of these glasses. According to another embodiment, first layer 31includes two or more sublayer with different oxides. According to oneembodiment, the first layer 31 is a deposited layer such as a PECVD(Plasma Enhanced Chemical Vapor Deposition) layer. According to anotherembodiment, the first layer 31 is a sputtered layer, which is a layerformed in a sputter process.

In the lateral direction, the passivation layer 3 may end distant to theedge surface 102 (as shown in FIG. 1). However, according to oneembodiment (shown in dashed lines in FIG. 1) the passivation layer 3 inthe lateral direction extends to the edge surface 102.

According to one embodiment, the second layer 32 is a PECVD siliconnitride layer. According to another embodiment, the second layer 32 is asputtered layer.

Referring to FIGS. 1 and 2, the passivation layer 3 may leave sectionsof the first surface 101 uncovered. For example, in a semiconductor bodyin which a power semiconductor device and low-voltage semiconductordevices are integrated, the passivation layer may not cover thoseregions of the first surface 101 below which the low-voltage devices areintegrated. However, this is only an example. According to a furtherembodiment (illustrated in dashed lines in FIGS. 1 and 2) thepassivation layer 3 completely covers the first surface 101 on thesemiconductor body 100 between the contact electrode 2 and the edgesurface 102 of the semiconductor body 100.

However, in each of these embodiments, the passivation layer 3 maycompletely surround the contact electrode 21 on the first surface 101.This is shown in FIG. 3, which illustrates a top view of the completesemiconductor body 100 (whereas FIGS. 1 and 2 only show one section ofthe semiconductor body 100 close to the edge surface 102).

FIG. 4 shows a vertical cross sectional view of one section of asemiconductor device according to another embodiment. In the embodimentsshown in FIGS. 1 and 2 edges of the first layer 31, the second layer 32,and the third layer 33 are substantially aligned. In the embodimentshown in FIG. 4, edges 33 ₁, 33 ₂ of the third layer 33 are distant toedges 32 ₁, 32 ₂ of the second layer 32. The edges of the first layer 31and the second layer 32 are substantially aligned in this embodiment.

In FIG. 4, reference characters 32 ₁, 33 ₁ denote inner edges of thesecond layer 32 and the third layer 33, respectively, which are edgesfacing the contact electrode 2, and reference characters 32 ₂, 33 ₂denote outer edges of the second layer 32 and the third layer 33,respectively, which are edges facing away from the contact electrode 2.Referring to FIG. 4, the inner edge 33 ₁ of the third layer 33 isdistant to the inner edge 32 ₁ of the second layer 32 such that thesecond layer 32 in the direction of the contact electrode 2 protrudesbeyond the second layer 32. That is, the third layer 33 does not coversections of the second layer 32 between the inner edge 32 ₁ of thesecond layer 32 and the inner edge 33 ₁ of the third layer 33. Further,the outer edge 33 ₂ of the third layer 33 is distant to the outer edge32 ₂ of the second layer 32 such that the second layer 32 in thedirection of edge surface 102 protrudes beyond the second layer 32. Thatis, the third layer 33 does not cover sections of the second layer 32between the outer edge 32 ₂ of the second layer 32 and the outer edge 33₂ of the third layer 33. A distance d4 between the inner edge 32 ₁ ofthe second layer 32 and the inner edge 33 ₁ of the third layer 33 is,for example, between 20 micrometers (μm) and 40 micrometers. A distanced5 between the outer edge 32 ₂ of the second layer 32 and the outer edge33 ₂ of the third layer 33 is, for example, between 20 micrometers (μm)and 40 micrometers.

Although in the embodiment shown in FIG. 4, there is a distance betweenthe inner edges 32 ₁, 33 ₁ and the outer edges 32 ₂, 33 ₂ of the secondlayer 32 and the third layer 33, this is only an example. According toanother embodiment, there is a distance only between one of the inneredges 32 ₁, 33 ₁ and the outer edges 32 ₂, 33 ₂ of the second layer 32and the third layer 33.

In the passivation layer 3, the oxide including first layer 31 and thenitride including second layer 32 act as humidity barriers that protectthose regions of the first surface 101 and the contact electrode 2 thatare covered by the passivation layer from humidity and corrosion.Corrosion of the contact electrode 2 and/or the semiconductor body 100may be caused by mobile ions travelling along the edges of the third,second, and first layer 33, 32, 32 to the contact electrode 2 and thefirst surface 101, respectively. In the embodiment shown in FIG. 4 inwhich there is a distance between the edges of the second layer 32 andthe third layers 33 there is a longer distance for those mobile ionsthat may travel along the surface of the third layer 33 from the thirdlayer to the contact electrode 2 and the first surface 101,respectively. This longer distance may additionally improve thecorrosion protection.

Referring to FIG. 5, the semiconductor device may additionally include asoft encapsulation layer 61 and a housing 62. In FIG. 5, only a sectionof the soft encapsulation layer 61 and the housing are shown. The softencapsulation layer 61 fills a space between the semiconductor 100 withthe contact electrode 2 and the passivation layer 3 and the housing 62.The housing may include openings through which contact pins (not shownin FIG. 5) extend from outside the housing to inside the housing. Thosecontact pins allow the semiconductor device to be contacted fromexternally, that is, from outside the housing. The soft encapsulationlayer 61 includes, for example, silicone or a silica gel.

The housing may include a bottom, sidewalls 62 ₁ and a cover 62 ₂,wherein in FIG. 5 only a section of one sidewall 62 ₁ and a section ofthe cover 62 ₂ are shown. The bottom (not shown) may include a substratesuch as, for example, a DCB (Direct Copper Bonding) substrate or a PCB(Printed Circuit Board). The sidewalls 62 ₁ and the cover 62 ₂ mayinclude an electrically insulating plastic material. The sidewallssidewall 62 ₁ and the cover 62 ₂ can be implemented as two separateparts. This allows the semiconductor body 100 to be packed in thehousing 62 as follows. First, an open housing 62 is provided, that is ahousing without cover. Then, the semiconductor body 100 is inserted inthe housing, the open housing is filled is with the soft encapsulationlayer 61, and the housing is closed by mounting the cover 62 ₂ on top ofthe sidewalls 62 ₁.

The topology explained above with the semiconductor body 100, thecontact electrode 2, and the passivation layer 3 may be used in aplurality of different semiconductor devices. FIG. 6 illustrates avertical cross sectional view of a semiconductor device that has thetopology explained with reference to FIG. 1 (although one of thetopologies explained with reference to FIGS. 2 and 4 may be used aswell) and includes a pn junction in the semiconductor body 100. The pnjunction is formed between a doped first device region 11 of a firstdoping type and a doped second device region 12 of a second doping typecomplementary to the first doping type. The second device region 12 iselectrically connected to the contact electrode 2. The first deviceregion 11 may extend to the edge surface 102. Further, below thepassivation layer 3, the first device region 11 may extend to the firstsurface 101. The region of the semiconductor body 100 in which the pnjunction is formed can be referred to as inner region 110, and theregion adjoining the inner region 110 can be referred to as outer regionor edge region 120. The edge region 120 may extend from the inner region110 to the edge surface 102 of the semiconductor body 100. However, thisis only an example. According to a further embodiment (not illustrated),further semiconductor regions may adjoin the edge region 120, such assemiconductor regions in which low-voltage semiconductor devices orlogic devices are implemented.

Referring to FIG. 6, the pn junction may extend to the surface 101 andbe covered by the passivation layer 3. That is, an edge surface of thecontact electrode 2 is distant to the position where the pn junctionextends to the first surface 101.

Optionally, the semiconductor device includes an edge terminationstructure in the edge region 120 below the passivation layer 3. The edgetermination structure may include a JTE (Junction Termination Extension)region 13 (as shown) of the second doping type. Additionally, the edgetermination structure may include a channel stopper region 14 of thefirst doping type and more highly doped than the first device region 11.The JTE region 13 and the channel stopper region 14 both adjoin thefirst surface 101 and are distant in the horizontal (lateral) directionof the semiconductor body 100. According to one embodiment, thepassivation layer 3 covers the complete edge termination structure. Thatis, in the embodiment shown in FIG. 6, the passivation layer 3 coversthe JTE region 13 and the channel stopper region 14. Other types of edgetermination structures may be used additionally or instead the JTEregion 13 such as, for example, edge termination structures includingfield rings and/or field plates.

The semiconductor device shown in FIG. 6 as well as the semiconductordevices explained below may include a soft encapsulation layer 61 and ahousing as explained with reference to FIG. 5. However, this is notshown in FIG. 6 and the following figures.

The passivation layer 3 explained before is suitable to be used in highvoltage semiconductor devices, such as semiconductor devices with avoltage blocking capability of several 100V, or several kilovolts (kV).The passivation layer 3 is, in particular, suitable to be used insemiconductor devices with a voltage blocking capability of 1 V andmore.

The device topology shown in FIG. 6 with the semiconductor body 100, acontact electrode 2 contacting one 12 of the device regions 11, 12, anda passivation layer 3 can be used in different semiconductor devices.Four possible embodiments are explained below with reference to FIGS.7-10.

Referring to FIG. 7, the semiconductor device may be implemented as abipolar diode, in particular as a power diode. FIG. 7 illustrates avertical cross sectional view of a power diode having a device topologyas explained with reference to FIG. 6. However, the passivation layer 3is not illustrated in detail (that is the individual layers of the layerstack are not shown) and the optional edge termination structure is notillustrated. The passivation layer 3 may be implemented in accordancewith one of the embodiments explained herein before.

In the diode shown in FIG. 7, the first device region 11 forms a baseregion of the diode and the second device region 12 forms a firstemitter, which is one of an n-emitter and a p-emitter of the diode.According to one embodiment, the base region 11 is n-doped, so that thesecond device region 12 is p-doped and forms a p-emitter (anode) of thediode. The diode further includes a second emitter region 15 of thefirst doping type, more highly doped than the base region 11, andadjoining the base region 11. The contact electrode 21 is electrically(ohmically) connected to the first emitter 12 and to a first terminal 41of the diode. The first terminal 41 forms an anode terminal if the firstemitter is a p-emitter. The second emitter of the diode is electricallyconnected to a second terminal 42. The second terminal 42 is a cathodeterminal if the second emitter is an n-emitter.

According to another embodiment shown in FIG. 8, the semiconductordevice is implemented as a Schottky diode. The device topology of theSchottky diode substantially corresponds to the device topology of thebipolar diode with the difference that the first emitter 12 is omitted,the contact electrode 2 includes a Schottky metal and contacts the baseregion 11. Examples of a Schottky metal include titanium (Ti), titaniumnitride, molybdenum (Mo), and molybdenum nitride. According to oneembodiment, the contact electrode 2 includes two sublayers 21, 22 asshown in FIG. 2, from which at least the first sublayer 21 that contactsthe base region 11 includes a Schottky metal. The second sublayer mayinclude aluminum, copper, or an alloy of at least one of aluminum andcopper.

Referring to FIG. 8, the JTE region 13 of the second doping typecomplementary to the doping type of the base region 11 may extend tobelow the contact electrode and be electrically connected to the contactelectrode. According to one embodiment, a contact region 16 of thesecond doping type and more highly doped than the JTE region 13 providesfor an ohmic contact between the contact electrode 2 and the JTE region13.

FIG. 9 illustrates a vertical cross sectional view of one embodiment ofan MOS transistor. In this MOS transistor the first device region 11 isa drift region and the second device region 12 is a body region. The MOStransistor includes a plurality of transistor cells 50. Each transistorcell includes a source region 51 separated from the drift region 11 bythe body region 12, a gate electrode 52 and a gate dielectric 53dielectrically insulating the gate electrode 52 from the source region51, the body region 12 and the drift region 11. The individualtransistor cells 50 share the drift region 11 and the drain region 14.The gate electrodes 52 are electrically connected to a gate electrode 43and electrically insulated from the contact electrode by insulationlayers 54. The contact electrode 2 forms a source electrode, isconnected to the source and body regions 51, 52, and is connected to thefirst terminal 41 that forms a source terminal. The drain region 14 isconnected to a second terminal 42 that forms the drain terminal.

The MOS transistor can be implemented as a MOSFET. In this case, thedrain region 14 has the same doping type as the drift region 11, but ismore highly doped. Alternatively, the MOS transistor is implemented asan IGBT. In this case, the drain region 14 is doped complementarily tothe drift region 11. The MOS transistor can be implemented as an n-typeor as a p-type transistor. In an n-type transistor the drift region 11and the source regions 51 are n-doped, while the body region 12 isp-doped. In a p-type transistor, the drift region 11 and the sourceregions 51 are p-doped, while the body region 12 is n-doped.

FIG. 10 shows a vertical cross sectional view of one embodiment of aJFET (Junction Field-Effect Transistor). FIG. 10 shows one section whichincludes a section of the inner region 110 and a section of the edgeregion 120 in the region of the first surface 101. The JFET is differentfrom the MOS transistor explained with reference to FIG. 9 in that thesource region 51, the body region 12, the drift region 11, and the drainregion (not shown in FIG. 10) have the same doping type, which is n-typein an n-JFET and p-type in a p-JFET. Further, instead of a gateelectrode, the JFET includes a doped gate region of a doping typecomplementary to the doping type of the body region 12. The gate region52′ adjoins the body region 12 and forms a pn-junction therewith. Thecontact electrode 2 is electrically connected to the source region 51and electrically insulated from the gate region 52′ by an insulationlayer 54. The contact electrode 2 forms a source electrode of the JFETand is connected to a source terminal, and the gate region 52′ iselectrically connected to a gate terminal 43. Like the MOS transistor,the JFET may include a plurality of transistor cells 50 that eachinclude a source region 51, a body region 12, and a gate region 52′, andthat share the drift region 11 and the drain region.

The JFET can be switched off by applying a drive potential to the gateregion 52′ such that a depletion region expands into the body region 12from the pn junction between the body region 12 and the gate region 52′and depletes the body region so as to interrupt a conducting channelbetween the source region 52 and the drift region 11. As shown, the bodyregion 12 may be located between the gate region 52′ and a doped regionof the same doping type as the gate region 52′ and electricallyconnected to the contact electrode (source electrode) 2. Alternatively(not shown), the body region 12 is located between two adjacent gateregions.

The device structure explained with reference to FIGS. 1-5 is notrestricted to be used in a bipolar diode, a Schottky diode, a MOStransistor, or a JFET but may be implemented in other types ofsemiconductor devices such as, for example, BJTs (Bipolar JunctionTransistors) as well.

FIGS. 11A-11C illustrate a first embodiment of a method for producing adevice topology as explained with reference to FIGS. 1 and 2 hereinbefore. FIGS. 9A-9C schematically illustrates vertical cross sectionalviews of the semiconductor body 100 at different stages of themanufacturing process.

Referring to FIG. 11A, the method includes forming a first precursorlayer 31′ on the contact electrode 2 and those sections of the firstsurface 101 not covered by the contact electrode 2. The first precursorlayer 31′ may completely cover the contact electrode 2 and thosesections of the first surface 101 not covered by the contact electrode2. After an etching process that is explained with reference to FIGS. 11B and 110 the first precursor layer 31′ forms the first layer 31.According to embodiment, forming the first precursor layer 31′ includesa PECVD process. Alternatively, forming the first precursor layer 31′includes a sputter process. As stated above, the first layer 31 mayinclude two or more sublayers with different material compositions.Thus, the first precursor layer 31′ may include two or more sublayerswith different material compositions. Those sublayers may be producedone above the other.

Before forming the first precursor layer 31′, a surface of the contactelectrode 2 and/or the first surface 101 of the semiconductor body 100may be roughened by, for example, sputtering in order to improve theadhesion of the first layer to the contact electrode 2 and the firstsurface, respectively.

Referring to FIG. 11A, the method further includes forming a secondprecursor layer 32′ on the first precursor layer 31′. The secondprecursor layer 32′ may completely cover the first precursor layer 31′.According to one embodiment, forming the second precursor layer 32′includes a PECVD process. Alternatively, forming the second precursorlayer 32′ includes a sputter process.

Referring to FIG. 11 B, the method further includes forming the thirdlayer 33 on the second precursor layer 32′. Forming the third layer 33may include forming a third precursor layer (not shown) that completelycovers the second precursor layer 32′ and patterning the third precursorlayer to form the third layer 33. Patterning the third precursor layermay include a photolithography process in which the third precursorlayer (like a conventional photoresist) is exposed using a lithographymask, and developed. Further, exposed or non-exposed sections (dependingon the type of development) are removed so as to form the third layer33.

The third layer 33 is used as an etch mask for etching the first andsecond precursor layers 31′, 32′ so as to form the first and secondlayers. The result of this etching process is shown in FIG. 110.

The third precursor layer (not shown in FIG. 11 B) may be a non-curedimide layer that can be patterned as explained before. After patterningthe third precursor layer and before using the third layer 33 as an etchmask for etching the first and second precursor layers 31′, 32′, thethird layer 33 is cured according to one embodiment. Curing makes thethird layer 33 hard and robust enough to act as the etch mask. Curingmay include an annealing process at temperatures between 300° C. and400° C.

After the process explained with reference to FIGS. 11A-11C, edges ofthe first layer 31, the second layer 32, and the third layer 33 arealigned. One embodiment of a process that produces edges of the thirdlayer to be distant to edges of the second layer 32 is explained withreference to FIGS. 12A-12B below.

This process is different from the process explained with reference toFIGS. 11A-11C in that patterning the first and second precursor layers31′, 32′ in order to form the first and second layers 31, 32 involves anetch mask 202 that is completely removed after forming the first andsecond layers 31, 32. This etch mask is shown in FIG. 12A.

Referring to FIG. 12B, after removing the etch mask 202, the thirdprecursor layer 33′ is formed on the second layer 32 and those sectionsof the contact electrode 2 and the first surface 101 not covered by thefirst and second layers 31, 32. According to one embodiment, the thirdprecursor layer 33′ is a non-cured imide layer. The method furtherincludes patterning the third precursor layer 33′. Patterning the thirdprecursor layer 33′ may include a lithography process as explainedbefore with reference to FIG. 11 B. By virtue of this process, the thirdprecursor layer 33′ can be patterned independent of the first and secondlayers 31, 32 so that the third layer 33 is produced to have inner andouter edges that are distant to inner and outer edges of the secondlayer 32, as explained with reference to FIG. 4. The third layer 33 maybe cured after the lithography process that patterns the third precursorlayer 33′.

Referring to FIG. 5, the method may further include forming the housing62 and filling a space in the housing 62 with the soft encapsulationlayer 61.

Although various exemplary embodiments of the invention have beendisclosed, it will be apparent to those skilled in the art that variouschanges and modifications can be made which will achieve some of theadvantages of the invention without departing from the spirit and scopeof the invention. It will be obvious to those reasonably skilled in theart that other components performing the same functions may be suitablysubstituted. It should be mentioned that features explained withreference to a specific figure may be combined with features of otherfigures, even in those cases in which this has not explicitly beenmentioned. Further, the methods of the invention may be achieved ineither all software implementations, using the appropriate processorinstructions, or in hybrid implementations that utilize a combination ofhardware logic and software logic to achieve the same results. Suchmodifications to the inventive concept are intended to be covered by theappended claims.

Spatially relative terms such as “under,” “below,” “lower,” “over,”“upper” and the like, are used for ease of description to explain thepositioning of one element relative to a second element. These terms areintended to encompass different orientations of the device in additionto different orientations than those depicted in the figures. Further,terms such as “first,” “second,” and the like, are also used to describevarious elements, regions, sections, etc. and are also not intended tobe limiting. Like terms refer to like elements throughout thedescription.

As used herein, the terms “having,” “containing,” “including,”“comprising” and the like are open ended terms that indicate thepresence of stated elements or features, but do not preclude additionalelements or features. The articles “a,” “an” and “the” are intended toinclude the plural as well as the singular, unless the context clearlyindicates otherwise.

It is to be understood that the features of the various embodimentsdescribed herein may be combined with each other, unless specificallynoted otherwise.

Although specific embodiments have been illustrated and describedherein, it will be appreciated by those of ordinary skill in the artthat a variety of alternate and/or equivalent implementations may besubstituted for the specific embodiments shown and described withoutdeparting from the scope of the present invention. This application isintended to cover any adaptations or variations of the specificembodiments discussed herein. Therefore, it is intended that thisinvention be limited only by the claims and the equivalents thereof.

What is claimed is:
 1. A semiconductor device, comprising: asemiconductor body comprising a first surface and an edge surfacelaterally terminating the first surface; a contact electrode formedabove the first surface and comprising an outer edge side that faces andis laterally spaced apart from the edge surface; and a passivation layersection covering the outer edge side of the contact electrode, whereinthe passivation layer section is a multi-layer stack comprising a firstlayer, a second layer, and a third layer, each of the first, second andthird layers being formed from different electrically insulatingmaterials, wherein the first layer directly contacts the contactelectrode, wherein the second layer is formed directly on the firstlayer, wherein the third layer is formed directly on the second layer,wherein each of the first, second and third layers comprise outer edgesides facing the edge surface of the semiconductor body and inner edgesides opposite from the outer edge sides, wherein the outer edge side ofthe contact electrode extends along a first plane that is transverse tothe first surface, wherein the first plane is disposed laterally betweenthe inner edge sides and the outer edge sides of each of the first,second and third layers, wherein a separation distance between the inneredge side of the third layer and the first plane is different than aseparation distance between the inner edge side of the second layer andthe first plane, wherein a separation distance between the outer edgeside of the third layer and the first plane is different than aseparation distance between the outer edge side of the second layer andthe first plane.
 2. The semiconductor device of claim 1, wherein theseparation distance between the inner edge side of the third layer andthe first plane is less than the separation distance between the inneredge side of the second layer and the first plane, and wherein theseparation distance between the outer edge side of the third layer andthe first plane is less than the separation distance between the outeredge side of the second layer and the first plane.
 3. The semiconductordevice of claim 1, wherein passivation layer section is part of apassivation layer that completely surrounds the contact electrode. 4.The semiconductor device of claim 1, further comprising a junctiontermination extension region disposed in the semiconductor body betweenthe contact electrode and the edge surface, and and wherein the firstlayer directly contacts the junction termination extension region. 5.The semiconductor device of claim 1, wherein the first layer directlycontacts the first surface of the semiconductor body.
 6. Thesemiconductor device of claim 1, wherein the multi-layer stack isarranged above the contact electrode and the first surface.
 7. Thesemiconductor device of claim 1, wherein the edge surface of thesemiconductor body extends along a second plane that is transverse tothe first surface, wherein the outer edge sides of each of the first,second and third layers are disposed laterally between the first planeand the second plane.
 8. The semiconductor device of claim 1, whereinthe inner edge sides of the first and second layers are laterallyaligned with one another, and wherein the outer edge sides of the firstand second layers are laterally aligned with one another.
 9. Thesemiconductor device of claim 1, wherein the outer edge side of thecontact electrode forms a complete loop that is laterally spaced apartfrom the edge surface of the semiconductor body in every direction,wherein the passivation layer section covers the outer edge side of thecontact electrode around the complete loop, wherein the inner edge sidesof the first, second and third layers are laterally spaced apart fromthe first plane around the complete loop, and wherein the outer edgesides of the first, second and third layers are laterally spaced apartfrom the outer edge side of the contact electrode around the completeloop.
 10. The semiconductor device of claim 1, further comprising: afirst doped region and a second doped region in the semiconductor body,wherein the first doped region and the second doped region form a pnjunction with one another, wherein the pn junction extends to the firstsurface, wherein the contact electrode is connected to the second dopedregion, and wherein the passivation layer covers the pn junction on topof the first surface.
 11. The semiconductor device of claim 1, whereinthe first layer comprises at least one of: USG, PSG, BSG, and BPSG. 12.The semiconductor device of claim 1, wherein the second layer comprisesa nitride.
 13. The semiconductor device of claim 1, wherein the thirdlayer comprises an imide.
 14. The semiconductor device of claim 1,wherein the first layer comprises at least one of: USG, PSG, BSG, andBPSG, wherein the second layer comprises a nitride, and wherein thethird layer comprises an imide.
 15. A method of forming a semiconductordevice, comprising: providing a semiconductor body comprising a firstsurface and an edge surface laterally terminating the first surface;forming a contact electrode on the first surface that comprises an outeredge side that faces and is laterally spaced apart from the edgesurface; and forming a passivation layer section that covers the outeredge side of the contact electrode, wherein the passivation layersection is a multi-layer stack comprising a first layer, a second layer,and a third layer, each of the first, second and third layers beingformed from different electrically insulating materials, wherein thefirst layer directly contacts the contact electrode and the firstsurface, wherein the second layer is formed directly on the first layer,wherein the third layer is formed directly on the second layer, whereineach of the first, second and third layers comprise outer edge sidesfacing the edge surface of the semiconductor body and inner edge sidesopposite from the outer edge sides, wherein the outer edge side of thecontact electrode extends along a first plane that is transverse to thefirst surface, wherein the first plane is disposed laterally between theinner edge sides and the outer edge sides of each of the first, secondand third layers, wherein a separation distance between the inner edgeside of the third layer and the first plane is different than aseparation distance between the inner edge side of the second layer andthe first plane, wherein a separation distance between the outer edgeside of the third layer and the first plane is different than aseparation distance between the outer edge side of the second layer andthe first plane.
 16. The method of claim 15, wherein the separationdistance between the inner edge side of the third layer and the firstplane is less than the separation distance between the inner edge sideof the second layer and the first plane, and wherein the separationdistance between the outer edge side of the third layer and the firstplane is less than the separation distance between the outer edge sideof the second layer and the first plane.
 17. The method of claim 15,wherein the edge surface of the semiconductor body extends along asecond plane that is transverse to the first surface, wherein the outeredge sides of each of the first, second and third layers are disposedlaterally between the first plane and the second plane.
 18. The methodof claim 15, wherein the outer edge side of the contact electrode formsa complete loop that is laterally spaced apart from the edge surface ofthe semiconductor body in every direction, wherein the passivation layersection covers the outer edge side of the contact electrode around thecomplete loop, wherein the inner edge sides of the first, second andthird layers are laterally spaced apart from the first plane around thecomplete loop, and wherein the outer edge sides of the first, second andthird layers are laterally spaced apart from the outer edge side of thecontact electrode around the complete loop.
 19. The method of claim 15,wherein forming the passivation layer section comprises patterning thefirst layer and the second layer in an etching process using the thirdlayer as an etch mask.
 20. The method of claim 15, wherein forming thepassivation layer section comprises patterning the first layer and thesecond layer in an etching process using a first etch mask, removing thefirst etch mask, depositing a precursor layer and patterning theprecursor layer to form the third layer.